SFM3xxx Sensor Platform for Flow Measurement in Respiratory Devices


Sensirion’s flow platform SFM3xxx includes sensors for inspiratory, expiratory and proximal flow measurement as well as gas mixing in ventilation and anesthesia applications. With the platform, Sensirion offers its customers the right sensor for all flow measurements and underscores its worldwide expertise in the field of medical ventilation. The SFM3xxx platform from Sensirion consists of multiple flow sensors with comprehensive capabilities for a diverse range of medical applications. All the sensors of the SFM3xxx platform share characteristics such as high precision and robustness. All are fully calibrated and temperature-compensated sensors and measure the flow rates of air and other non-corrosive gases bidirectionally and accurately. They also impress with very low pressure drop and fast signal processing times.

With this comprehensive range of features, the sensors of the SFM3xxx platform cover all gas flow measurement requirements in medical technology. The sensors can be used in a wide range of medical applications, such as artificial ventilation, anesthesia, drug delivery and metabolic measurements. The SFM3000, SFM3100 and SFM3200 mass flow meters are suitable for inspiratory flow measurements and gas mixing, while the autoclavable and single-use SFM3200-AW, SFM3300 and SFM3400 mass flow meters are the first choice for expiratory or proximal flow measurements.

The SFM3000 digital mass flow meter is ideal for high-volume applications in which cost efficiency is the priority. With the SFM3100, Sensirion offers a similar product that can be easily integrated into existing devices. A temperature sensor in the gas channel of the sensor enables highly precise temperature compensation and eliminates the need for an additional temperature sensor. The SFM3200 mass flow meter boasts a wide dynamic measurement range, high precision at low flow rates and low pressure drop in the flow body of the sensor.

With the SFM3200-AW, the SFM3300-AW and the SFM3400-AW, Sensirion also offers three autoclavable mass flow meters. Thanks to their robustness, the sensors can be treated in an autoclave, making them sterilizable and thus reusable. The SFM3200-AW offers outstanding performance at low flow rates and is used primarily in expiratory flow measurement applications, while the SFM3300 series (for adult ventilation) and the SFM3400 series (for pediatric and neonatal applications) were developed for proximal flow measurement. Both sensor variants are available in the reusable option “AW” and the single-use option “D”. As both expiratory and proximal flow measurement have to work with humid respiratory air, a special, externally controllable heating element has been integrated. This helps prevent condensation on the sensor element.

Like all sensors from Sensirion, the outstanding performance of the SFM3xxx platform is based on the patented CMOSens® Technology. This enables integration of the sensor and evaluation circuit on a single CMOS silicon chip. The result is an ultra-precision system that offers long-term stability for sophisticated and cost-sensitive applications. The technology is also highly resistant to environmental effects, which is why CMOSens® based flow sensors are perfect for use as sterilizable sensors.


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