Introducing wide range of MEMS sensors from Murata for industrial applications

Murata are one of the global market leaders for MEMS based sensors used in automotive applications, they have taken this know-how gained over many years in one of the harshest application environments where endurance, resistance to shock/vibration and reliability are critical and have applied it to their range of MEMS sensors aimed at industrial & medical applications.

Sensors are becoming much more widespread as demand grows for intelligent products which are able to interact with users and the environment they are being deployed in. Industry 4.0 is a great example of where next generation machines are being developed with a multitude of integrated sensors which are used to collect data from the process allowing greater understanding of production yields helping to increase efficiency. The sensors can also be used to detect and predict machine failures allowing preventative maintenance scheduling to minimise machine downtime.

Murata’s sensors are based on their proprietary 3D MEMS technology which offers the following key benefits.

  • High reliability – Best-in-class, proven measurement accuracy over lifetime in harsh environments (temperature, humidity)
  • High robustness – Excellent performance in high vibration environments, tolerates extreme mechanical shocks
  • Small size – Enabling design of smaller systems with lower costs
  • Low power consumption – High insulation resistance and large capacitance dynamics enable ultra-low current consumption circuit designs

The range of MEMS sensors from Murata includes Accelerometers, Inclinometers, Gyroscopes and Combined Sensors, the devices are available with analog or digital outputs depending on the model chosen.

The Murata MEMS sensors are suitable for a wide range of applications including but not limited to Instruments, Heavy Duty Vehicles, Professional Levelling, Angle Measurement and Control, Tilt Compensation, Inertial Measurement Units (IMUs) for heavy machine and automotive (ADAS), Motion Analysis and Control, Navigation Systems, Acceleration measurement, Inclination measurement, Motion measurement, Vibration measurement, Industrial machines and Medical patient beds.

Key Features

  • High performance
  • Robust design suitable for Industrial and Medical applications
  • Utilising Murata’s proven 3D MEMS technology
  • Low power consumption
  • High Stability
  • Excellent accuracy
  • Wide operating temperature range
  • Excellent shock durability
  • Digital and Analog interface options
  • Low noise level
  • Superior stability over temperature and time
  • Compact DIL and SMD package options



Murata is the global market leader in low-g acceleration sensors for automotive applications. The extensive accelerometer product range includes high performance digital and analog accelerometers for both safety critical automotive and industrial applications.
Murata accelerometers are based on the company’s proprietary 3D MEMS technology and they offer a number of excellent product features and benefits for the most demanding applications. The sensing element and the measuring ASIC are assembled in a dual-in-line or dual-in-flat-line plastic package with pins for surface mount and re-flow soldering. They are environmentally protected with silicone gel resulting in excellent performance and reliability in a humid environment and at temperature cycling. In addition, the robust sensing element design with over damped frequency response enables excellent performance even in harsh and vibrating environments.

The measuring direction is parallel or perpendicular to the mounting plane. The ASIC includes an on-chip EEPROM memory with the calibration coefficients for unit interchangeability. Murata accelerometers include enhanced failure detection: digitally activated self-test, calibration memory parity or check sum check and continuous connection failure detection. The products are intended for horizontal or vertical measurements. The zero point temperature dependence is less than 1mg/°C.